Article
Neural electrode fabrication using spin-coated cyclic olefin copolymer film
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Authors
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Hwi Ahn
- Department of Electrical and Computer Engineering, Seoul National University, Seoul, South Korea
| Published: | May 9, 2025 |
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Outline
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Objective: To reduce surface roughness and improve optical properties of cyclic olefin copolymer (COC) based electrode.
Materials and Methods: First, 4 grams of COC pellets were dissolved in 20 ml of cyclohexane. Next, UV dicing tape was attached to 4 inch wafer to facilitate delamination of spin-coated film. Then, the solution was applied thoroughly on top of the UV dicing tape before spin coating. Spin coating was conducted at 500 rpm for 30 seconds. After spin coating, UV light was exposed to peel off UV dicing tape. The coated film was cured at 300° C for 10 minutes. Titanium and gold were deposited on fabricated COC film sequentially. Electrode pattern was made with standard photolithography process. Finally, patterned COC film was laminated with another COC film with hydraulic heat press.
Results: The fabricated COC electrode showed good transparency and smooth surface. Thickness of spin-coated COC film was 15 μm. Two spin-coated films were successfully laminated to compose a neural electrode.
Discussion: Spin-coated COC film showed excellent properties. Film thickness could be easily controlled utilizing spin coating process. However, high temperature was required to thoroughly evaporate remaining solvent. When spin-coated film was too thick, bubbles were formed due to evaporated cyclohexane.
Acknowledgment: This research was supported by a grant of the Korea Health Technology RD Project through the Korea Health Industry Development Institute (KHIDI), funded by the Ministry of Health Welfare, Republic of Korea (grant number: RS-2023-00304861).
